7/27/2012	9:44:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2012	9:44:37 AM	Recipe started at 9:44 AM
7/27/2012	9:44:37 AM	Helium valve closed
7/27/2012	9:44:37 AM	H2 valve closed
7/27/2012	9:44:37 AM	BCl3 valve closed
7/27/2012	9:44:37 AM	PH3 valve closed
7/27/2012	9:44:37 AM	SiCl4 pre valve closed
7/27/2012	9:44:37 AM	SiCl4 post valve closed
7/27/2012	9:44:37 AM	Main Vac valve closed
7/27/2012	9:44:37 AM	Bypass valve closed
7/27/2012	9:44:37 AM	Bubbler valve closed
7/27/2012	9:44:37 AM	Helium MFC set to  0.000000
7/27/2012	9:44:37 AM	H2 MFC set to  0.000000
7/27/2012	9:44:37 AM	BCl3 MFC set to  0.000000
7/27/2012	9:44:37 AM	PH3 MFC set to  0.000000
7/27/2012	9:44:37 AM	SiCl4 MFC set to  0.000000
7/27/2012	9:44:37 AM	Bypass solenoid MFC set to  0.000000
7/27/2012	9:44:38 AM	Tube furnace set to 0
7/27/2012	9:44:41 AM	H2 valve closed
7/27/2012	9:44:41 AM	BCl3 valve closed
7/27/2012	9:44:41 AM	PH3 valve closed
7/27/2012	9:44:41 AM	SiCl4 pre valve closed
7/27/2012	9:44:41 AM	SiCl4 post valve closed
7/27/2012	9:44:41 AM	Main Vac valve closed
7/27/2012	9:44:41 AM	Bypass valve closed
7/27/2012	9:44:41 AM	Bubbler valve closed
7/27/2012	9:44:41 AM	Helium valve opened
7/27/2012	9:44:41 AM	Helium MFC set to  500.000000
7/27/2012	9:44:41 AM	H2 MFC set to  0.000000
7/27/2012	9:44:41 AM	BCl3 MFC set to  0.000000
7/27/2012	9:44:41 AM	PH3 MFC set to  0.000000
7/27/2012	9:44:41 AM	SiCl4 MFC set to  0.000000
7/27/2012	9:44:41 AM	Bypass solenoid MFC set to  0.000000
7/27/2012	9:44:41 AM	Tube furnace set to 0
7/27/2012	9:45:54 AM	Helium valve closed
7/27/2012	9:45:54 AM	H2 valve closed
7/27/2012	9:45:54 AM	BCl3 valve closed
7/27/2012	9:45:54 AM	PH3 valve closed
7/27/2012	9:45:54 AM	SiCl4 pre valve closed
7/27/2012	9:45:54 AM	SiCl4 post valve closed
7/27/2012	9:45:54 AM	Main Vac valve closed
7/27/2012	9:45:54 AM	Bypass valve closed
7/27/2012	9:45:54 AM	Bubbler valve closed
7/27/2012	9:45:54 AM	Helium MFC set to  0.000000
7/27/2012	9:45:54 AM	H2 MFC set to  0.000000
7/27/2012	9:45:54 AM	BCl3 MFC set to  0.000000
7/27/2012	9:45:54 AM	PH3 MFC set to  0.000000
7/27/2012	9:45:54 AM	SiCl4 MFC set to  0.000000
7/27/2012	9:45:54 AM	Bypass solenoid MFC set to  0.000000
7/27/2012	9:45:54 AM	Tube furnace set to 0
7/27/2012	9:45:55 AM	Run finished at 9:45 AM
7/27/2012	9:45:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2012	9:48:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2012	9:48:05 AM	Recipe started at 9:48 AM
7/27/2012	9:48:05 AM	Helium valve closed
7/27/2012	9:48:05 AM	H2 valve closed
7/27/2012	9:48:05 AM	BCl3 valve closed
7/27/2012	9:48:05 AM	PH3 valve closed
7/27/2012	9:48:05 AM	SiCl4 pre valve closed
7/27/2012	9:48:05 AM	SiCl4 post valve closed
7/27/2012	9:48:05 AM	Main Vac valve closed
7/27/2012	9:48:05 AM	Bubbler valve closed
7/27/2012	9:48:05 AM	Bypass valve opened
7/27/2012	9:48:05 AM	Helium MFC set to  0.000000
7/27/2012	9:48:05 AM	H2 MFC set to  0.000000
7/27/2012	9:48:05 AM	BCl3 MFC set to  0.000000
7/27/2012	9:48:05 AM	PH3 MFC set to  0.000000
7/27/2012	9:48:05 AM	SiCl4 MFC set to  0.000000
7/27/2012	9:48:05 AM	Bypass solenoid MFC set to  0.000000
7/27/2012	9:48:06 AM	Tube furnace set to 0
7/27/2012	9:49:16 AM	Helium valve closed
7/27/2012	9:49:16 AM	H2 valve closed
7/27/2012	9:49:16 AM	BCl3 valve closed
7/27/2012	9:49:16 AM	PH3 valve closed
7/27/2012	9:49:16 AM	SiCl4 pre valve closed
7/27/2012	9:49:16 AM	SiCl4 post valve closed
7/27/2012	9:49:16 AM	Main Vac valve closed
7/27/2012	9:49:16 AM	Bubbler valve closed
7/27/2012	9:49:16 AM	Bypass valve opened
7/27/2012	9:49:16 AM	Helium MFC set to  0.000000
7/27/2012	9:49:16 AM	H2 MFC set to  0.000000
7/27/2012	9:49:16 AM	BCl3 MFC set to  0.000000
7/27/2012	9:49:16 AM	PH3 MFC set to  0.000000
7/27/2012	9:49:16 AM	SiCl4 MFC set to  0.000000
7/27/2012	9:49:16 AM	Bypass solenoid MFC set to  0.000000
7/27/2012	9:49:16 AM	Tube furnace set to 0
7/27/2012	9:50:16 AM	Helium valve closed
7/27/2012	9:50:16 AM	H2 valve closed
7/27/2012	9:50:16 AM	BCl3 valve closed
7/27/2012	9:50:16 AM	PH3 valve closed
7/27/2012	9:50:16 AM	SiCl4 pre valve closed
7/27/2012	9:50:16 AM	SiCl4 post valve closed
7/27/2012	9:50:16 AM	Bypass valve closed
7/27/2012	9:50:16 AM	Bubbler valve closed
7/27/2012	9:50:16 AM	Main Vac valve opened
7/27/2012	9:50:16 AM	Helium MFC set to  0.000000
7/27/2012	9:50:16 AM	H2 MFC set to  0.000000
7/27/2012	9:50:16 AM	BCl3 MFC set to  0.000000
7/27/2012	9:50:16 AM	PH3 MFC set to  0.000000
7/27/2012	9:50:16 AM	SiCl4 MFC set to  0.000000
7/27/2012	9:50:16 AM	Bypass solenoid MFC set to  0.000000
7/27/2012	9:50:16 AM	Tube furnace set to 0
7/27/2012	9:50:17 AM	Run finished at 9:50 AM
7/27/2012	9:50:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
